Speeding innovation for industry
Article | Micro-nanotechnologies
Information and Communication Technologies (ICTs)
Micro and nano electromechanical systems (MEMS and NEMS) manufacturers are on a constant quest to lower chip energy consumption while keeping the cost of manufacturing key chip components down.
CEA Tech institute Leti brings 35 years of experience in MEMS R&D, and is one of the world’s largest centers for MEMS research. The institute has successfully transferred many of its innovations to manufacturers.
Leti offers a broad range of services covering the entire MEMS and NEMS development cycle, addressing sensors, switches, RF components, 3D integration, characterization, and reliability testing to partners’ specifications.
The institute’s flagship M&NEMS technology makes it possible to integrate nano-objects (piezoresistive nanowires) and MEMS onto a single sensor. This innovation—smaller than traditional MEMS capacitive sensors—marks an advance toward reducing manufacturing costs.
Low-temperature (< 500 °C) transistor fabrication processes were implemented at CEA-Leti, a CEA Tech institute to demonstrate the integration of powerful CMOS systems in a world first. The successful implementation of these processes will pave the way toward sequential 3D integration that does not damage the chip or negatively impact performance.
CEA-Leti, a CEA Tech institute, is gradually shifting over to more sustainable practices.
The city of San Francisco is keeping a close eye on air pollution with a little help from a startup from France and its real-time air-quality monitoring solution.
Soitec, one of the seven leads of the Nano 2022 plan, and Leti, a CEA Tech institute, recently renewed and expanded their innovative substrate R&D partnership.
Leti, a CEA Tech institute, is coordinating the development of ISO standards for microfluidics. The goal is to speed up research and development in a field where design rules are often proprietary and empirical.
How to collaborate with CEA Tech teams ?
CEA is a French government-funded technological research organisation in four main areas: low-carbon energies, defense and security, information technologies and health technologies. A prominent player in the European Research Area, it is involved in setting up collaborative projects with many partners around the world.