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Article | Micro-nanotechnologies


Information and Communication Technologies (ICTs)

Micro and nanosystems

Published on 2 March 2017

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​Micro and nano electromechanical systems (MEMS and NEMS) manufacturers are on a constant quest to lower chip energy consumption while keeping the cost of manufacturing key chip components down.

CEA Tech institute Leti brings 35 years of experience in MEMS R&D, and is one of the world’s largest centers for MEMS research. The institute has successfully transferred many of its innovations to manufacturers.

Leti offers a broad range of services covering the entire MEMS and NEMS development cycle, addressing sensors, switches, RF components, 3D integration, characterization, and reliability testing to partners’ specifications.

The institute’s flagship M&NEMS technology makes it possible to integrate nano-objects (piezoresistive nanowires) and MEMS onto a single sensor. This innovation—smaller than traditional MEMS capacitive sensors—marks an advance toward reducing manufacturing costs.


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